한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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- Pages.322-323
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- 2003
실리콘 마이크로머시닝을 이용한 광섬유 간섭계형 가속도 센서
Fiber-optic interferometric accelerometer using silicon micromachining.
초록
Silicon substrate was fabricated by bulk silicon micromachining and it's structure is based on a proof mass suspended by two beam. To monitor the acceleration, dynamic excitation of accelerometer was performed using a shaker. The attached FFPI and suspension beam are bent because support beam move with variation of the proof mass. Thus phase difference detected by the acceleration change. So we can know that resonance frequency of fabricated accelerometer is about 557 Hz and dynamic range was measured from 0 g to 2 g.
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