Fiber-optic interferometric accelerometer using silicon micromachining.

실리콘 마이크로머시닝을 이용한 광섬유 간섭계형 가속도 센서

Silicon substrate was fabricated by bulk silicon micromachining and it's structure is based on a proof mass suspended by two beam. To monitor the acceleration, dynamic excitation of accelerometer was performed using a shaker. The attached FFPI and suspension beam are bent because support beam move with variation of the proof mass. Thus phase difference detected by the acceleration change. So we can know that resonance frequency of fabricated accelerometer is about 557 Hz and dynamic range was measured from 0 g to 2 g.