Study on deposition condition of multi-layer oxide buffer by PLD for YBCO Coated Conductor

PLD법에 의한 YBCO Coated Conductor를 위한 다층 산화물 박막의 증착 조건 연구

The multi-layer oxide buffer layer for the coated conductor was deposited on biaxially textured Ni substrates using pulsed laser deposition. Oxygen partial pressure, 4％$H_2$/Ar partial pressure, and deposition temperature were deposition variables investigated to find the optimum deposition conditions. $Y_2$O$_3$seed layer was deposited epitaxially on metal substrate. The full buffer architecture of $Y_2$O$_3$/YSZ/CeO$_2$was successfully prepared on metal substrate.