한국초전도저온공학회:학술대회논문집 (Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference)
- 한국초전도저온공학회 2003년도 추계학술대회 논문집
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- Pages.21-23
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- 2003
MOCVD (metal organic chemical vapor deposition)법으로 제조한 YBCO 초전도 coated conductors
YBCO coated conductors fabricated by a MOCVD (metal organic chemical vapor deposition) method
초록
MOCVD method is one of promising techniques which can fabricate YBCO coated conductors in a low Price A continuous reel-to-reel MOCVD device using a dispersed solid source was designed and manufactured. YBCO films were deposited on various substrates of metallic silver, (100) MgO and SrTiO3 single crystals. The chemical composition of the metal organic sources was changed to optimize the processing condition associate to the deposition of the stoichiometric Y3a2Cu3O7-y. We report the superconducting transition temperature, surface morphology and chemical composition of the YBCO film surfaces.
키워드