저온 다결정 실리콘 박막 및 태양전지 연구개발동향

Status of Low Temperature Polycrystalline Silicon Films and Solar Cells

  • 이정철 (한국에너지기술연구원, 태양광연구센타) ;
  • 김석기 (한국에너지기술연구원, 태양광연구센타) ;
  • 윤경훈 (한국에너지기술연구원, 태양광연구센타) ;
  • 송진수 (한국에너지기술연구원, 태양광연구센타) ;
  • 박이준 (한국에너지기술연구원, 태양광연구센타)
  • 발행 : 2003.07.01

초록

This review article gives a comprehensive compilation of recent developments in low temperature deposited poly Si flms, also known as microcrystalline silicon. The development of various ion energy suppression techniques for plasma enhanced chemical vapour deposition and ionless depositions such as HWCVD and expanding thermal plasma, and their effect on the material and solar cell efficiencies are described. A correlation between ef.ciency and the two most important process parameters, i.e., growth rate and process temperature is carried out. Finally, the application of these poly Si cells in multijunction cell structures and the best efficiencies worldwide by various deposition techniques are discussed.

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