대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2003년도 하계종합학술대회 논문집 II
- /
- Pages.995-998
- /
- 2003
XRD 패턴에 따른 유무기복합 화합물의 특성
Properites of Inorganic Hybrid Silica Materials according to the XRD patterns
초록
This paper reports the correlation between dielectric constant and degree of amorphism of the hybrid type Si-O-C thin films. Si-O-C thin films were deposited by high density plasma chemical vapor deposition using bistrimethyl- silylmethane(BTMSM,
키워드