Properties of Boron Carbide Thin Films by Reactively Sputtered Boron Target

  • Lee, K. E. (Chungnam National University) ;
  • Kim, C. O. (Chungnam National University) ;
  • Kim, J. H. (ReCAMM) ;
  • Lee, J. Y. (R&D center of Semtech) ;
  • Park, M. J. (R&D center of Semtech) ;
  • Lee, C. B. (R&D center of Semtech) ;
  • Kim, Y. L. (KRISS) ;
  • J, H. Han (KRISS)
  • 발행 : 2003.06.01