미세 펄스 전압을 이용한 마이크로 전해가공에 관한 연구

A study of electrochemical micromachining with voltage pulses

Electrochemical micromachining which is not normally considered as a precision process is presented in this paper. The application of voltage Pulses between a tool electrode and a workpiece in an electrochemical environment allows the three-dimensional machining of conducting materials with micrometer precision. In this paper tool-electrodes($5\mu\textrm{m}$ in diameter, 1mm in length) are developed by electrochemical micromaching and micro holes are manufactured using this tool-electrodes we developed already. Micro holes are achieved the accuracy below $50\mu\textrm{m}$ in diameter using ultrashort voltage pulses(0.1-5$\mu\textrm{s}$).