한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)

한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

미세채널 구조물 상부의 초정밀 연마 기술 연구

A Study on the Ultra-Precision Polishing Technique for the Upper Surface of the Micro-Channel Structure

  • 강정일 (서울산업대학교 기계공학과) ;
  • 이윤호 (서울산업대학교 기계공학과 학부) ;
  • 안병운 (서울산업대학교 대학원 기계공학과) ;
  • 윤종학 (서울산업대학교 기계공학과)
  • 발행 : 2003.10.01
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초록

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

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