Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Nano Position Control of Plane X-Y Stage Using Minimum Order Observer

최소차원 관측기를 이용한 평면 X-Y 스테이지의 나노 위치제어

  • 김재열 (조선대학교 기전공학과) ;
  • 윤성운 (조선대학교 기계공학과) ;
  • 곽이구 (조선대학교 대학원 정밀기계공학과) ;
  • 안재신 (조선대학교 대학원 정밀기계공학과) ;
  • 한재호 (송원대학교 자동차과)
  • Published : 2003.10.01
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Abstract

Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modem control theory, dual servo algorithm is developed by minimum order observer, and stability priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

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