초음파 이송 시스템에서 Flexural Beam의 형태 변화와 물체 이송과의 관계에 대한 연구

A Study on the Relationship between Flexural Beam Shape and Transport Characteristics for the Ultrasonic Transport Systems

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.