Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.11a
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- Pages.163-163
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- 2003
ECR plasma pretreatment of the TiN films for $RuO_2$ MOCVD
$RuO_2$ MOCVD를 위한 TiN막의 ECR plasma 전처리
Abstract
TiN barrier막 위에 metal organic chemical deposition(MOCVD)법으로 RuO
Keywords