Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.03a
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- Pages.87-87
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- 2003
Characteristics of $Ta_2O_5$ Thin Film at Various Annealing Temperature
열처리 온도에 따른 $Ta_2O_5$ 박막의 특성변화
Abstract
Keywords