한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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- Pages.75-75
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- 2003
ECRCVD의 증착 조건에 따른 비정질 수소화 탄소의 나노스케일 마찰특성 연구
The Effects of ECRCVD Deposition Conditions on Nanoscale Friction of Hydrogenated Amorphous Carbon Thin Film
- Ko, Myoung-Gyun (Department of Nano-structure Semiconductor Engineering, Hanyang University) ;
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Lee, You-Kee
(Division of Information and Communication Engineering, Uiduk University)
;
- Kim, Jung-Yuel (Division of Information and Communication Engineering, Uiduk University) ;
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Lee, Young-Ki
(Division of Information and Communication Engineering, Uiduk University)
;
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Park, Jong-Wan
(Department of Nano-structure Semiconductor Engineering, Hanyang University)
- 발행 : 2003.05.01