Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2003.03a
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- Pages.64-64
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- 2003
Anti-adhesion and Nanomechanical Characteristics of Fluorocarbon Films for Nanoscale Device Fabrication
나노스케일 소자에 대한 불화유기박막의 점착방지 특성 평가
Abstract
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