한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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- Pages.53-53
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- 2003
The formation of highly ordered nano pores in Anodic Aluminum Oxide
- Im, Wan-soon (Department of Materials Engineering, Chungnam National University) ;
- Cho, Kyung-Chul (Department of Materials Engineering, Chungnam National University) ;
- Cho, You-suk (Department of Materials Engineering, Chungnam National University) ;
- Park, Gyu-Seok (Department of Materials Engineering, Chungnam National University) ;
- Kim, Dojin (Department of Materials Engineering, Chungnam National University)
- 발행 : 2003.05.01
초록
There has been increasing interest in the fabrication of nano-sized structures because of their various advantages and applications. Anodic Aluminum Oxide (AAO) is one of the most successful methods to obtain highly ordered nano pores and channels. Also It can be obtained diverse pore diameter, density and depth through the control of anodization condition. The three types of substrates were used for anodization; sheets of Aluminum on Si wafer and Aluminum on Mo-coated Si wafer. In Aluminum sheet, a highly ordered array of nanoholes was formed by the two step anodization in 0.3M oxalic acid solutions at 10