한국초전도저온공학회:학술대회논문집 (Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference)

한국초전도저온학회 (The Korean Society of Superconductivity and Cryogenics)
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펄스레이저 증착에 의한 YBa2Cu3O7-$\delta$박막의 성장과 특성분석

Growth and characterization of YBa2Cu3O7-$\delta$ thin films using pulsed laser

  • 정준기 (한국전기연구원 초전도응용연구그룹) ;
  • 고락길 (한국전기연구원 초전도응용연구그룹) ;
  • 최수정 (한국전기연구원 초전도응용연구그룹) ;
  • 송규정 (한국전기연구원 초전도응용연구그룹) ;
  • 박찬 (한국전기연구원 초전도응용연구그룹)
  • Chung, J.K. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Ko, R.K. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Choi, S.J. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Song, K.J. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Park, C. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute)
  • 발행 : 2003.02.01
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초록

YBa$_2$Cu$_3$O$_{7-{\delta}}$(YBCO) high temperature superconducting thin films were grown on SrTiO$_3$single crystal substrates by pulsed laser deposition(PLD). The texture and lattice parameter of the YBCO films were analysed using the GADDS (general area detector diffraction system) which enables XRD analyses to be done faster and with fewer sample movement than with the XRD system with point detector. The XRD results of the films grown in different deposition conditions are reported together with the SEM microstructure analysis results.ysis results.

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