PLD 법에 의한 YBCO 박막의 증착 조건에 따른 특성

Study on deposition conditions of YBGO films grown by pulsed laser deposition

  • 최수정 (한국전기연구원 초전도응용연구그룹) ;
  • 정준기 (한국전기연구원 초전도응용연구그룹) ;
  • 박유미 (한국전기연구원 초전도응용연구그룹) ;
  • 고락길 (한국전기연구원 초전도응용연구그룹) ;
  • 송규정 (한국전기연구원 초전도응용연구그룹) ;
  • 박찬 (한국전기연구원 초전도응용연구그룹) ;
  • 유상임 (서울대학교 재료공학부)
  • Choi, S.J. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Jeong, J.K. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Park, Y.M. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Ko, R.K. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Song, K.J. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Park, C. (Applied Superconductivity Laboratory, Korea Electrotechnology Research Institute) ;
  • Yu, S.I. (School of Materials Science & Engineering, Seoul National University)
  • 발행 : 2003.02.01

초록

The high temperature superconducting YBCO films were deposited on the SrTiO$_3$(100) single crystals to find out the proper deposition conditions of YBCO on biaxially-textured metal substrates. Different sets of the substrate temperature, oxygen partial pressure and laser fluence were used to investigate the effect of deposition conditions on the superconducting properties. The new apparatuses for measuring critical temperature (Tc) and critical current (Ic) were designed and manufactured, which were used to obtain Tc's and Ic's of the deposited films. The accuracy of the new apparatus was confirmed by comparing the results with those from SQUID magnetometer. The results on the YBCO films deposited on single crystal substrates which will be used to get the optimum deposition conditions of YBCO films in the coated conductor, are summarized in this report.

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