Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

2003.05a
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Pages.95-95
/
2003

The Korean Institute of Surface Engineering (한국표면공학회)

권호 표지

Deposition of TiO$_2$ thin films using grid-assisting magnetron sputtering

Min J. Jung (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
Kim, Yong M. (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
yun M. Chung (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
Jeon G. Han (Center for Advanced Plasma Surface Technology Sungkyunkwan University)

Published : 2003.05.01

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