Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2003.05a
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- Pages.66-67
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- 2003
The characteristic properties of boundary layer in high speed steel/c-BN thin films by Microwave Plasma assisted Hot filament CVD system
Microwave Plasma assisted Hot Filament CVD system에 의한 고속도강/c-BN 박막의 제조 및 계면층 특성에 관하여
Abstract
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