Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 1998.06a
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- Pages.461-464
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- 1998
Fabrication and Character istics of self-aligned AlGaAs/GaAs HBT using $WN_{x}$ as emitter metal
$WN_{x}$ 에미터 전극을 갖는 자기정렬 AlGaAs/GaAs HBT의 제작과 특성
Abstract
Self-aligned AlGaAs/GaAs HBTs with the emitter area of 1.5*10.mu.
Keywords