Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 1998.06a
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- Pages.375-378
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- 1998
Dry etching of pt thin film in inductive coupled BCl$_{3}$ /Cl$_{2}$ plasmas
유도 결합 BCl$_{3}$ /Cl$_{2}$ 플라즈마내에서 Pt 박막의 건식 식각
Abstract
Platinum thin film which hardly form volatile compounds with any reactive gas at normal process temperature was etched in inductive coupled BCl
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