Fabrication of RF-Magnetic Inductor Using FeCrTaN films

  • Song Byung-chan (Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University) ;
  • Kim Chung-Sik (Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University) ;
  • Bae Seok (Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University) ;
  • Nam Seoung-Eui (Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University) ;
  • Kim Hyoung-June (Dept. of Metallurgical Engineering and Materials Science, Hong-Ik University)
  • Published : 2003.12.01