Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)
- 2003.12a
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- Pages.208-208
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- 2003
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- 2233-9485(pISSN)
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- 2233-9574(eISSN)
High-rate-deposition of Ni-Zn ferrite thin-films using ECR sputtering with conic target
- Ogita Tomoharu (Faculty of Engineering, Yamaguchi University) ;
- Yamamoto Setsuo (Faculty of Engineering, Yamaguchi University) ;
- Kurisu Hiroki (Faculty of Engineering, Yamaguchi University) ;
- Matsuura Mitsuru (Faculty of Engineering, Yamaguchi University) ;
- Shimosato Yoshihiro (SHIMADZU Corporation) ;
- Okada Shigenobu (SHIMADZU Corporation)
- Published : 2003.12.01
Abstract
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