Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)
- 2003.12a
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- Pages.50-50
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- 2003
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- 2233-9485(pISSN)
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- 2233-9574(eISSN)
Controlled oxidization process for ultra-thin aluminium films in high-performance magnetic tunnel junctions by using the microwave-excited plasma with radial line slot antenna
- Tsunoda Masakiyo (Department of Electronic Engineering, Tohoku University) ;
- Yoshimura Satoru (Department of Electronic Engineering, Tohoku University) ;
- Takahashi Migaku (Department of Electronic Engineering, Tohoku University, New Industry creation Hatchery Center, Tohoku University)
- Published : 2003.12.01
Abstract
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