전력전자학회:학술대회논문집 (Proceedings of the KIPE Conference)
- 전력전자학회 2003년도 춘계전력전자학술대회 논문집(2)
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- Pages.611-615
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- 2003
리모트 프라즈마 전원용 하프 브리지 인버터의 운전 특성
A Operation characteristics of the HB inverter for Remote Plasma Source
초록
In this paper, a operation characteristics and analysis of the HB(half bridge) inverter for remote plasma system are studied. the remote plasma system is cleaning system for the chemical vapor deposition (CVD) chamber in semiconductor processing. The remote plasma system is powered by the RF generator The main power stage of the RF generator is used for the HB PWM inverter with an low pass filter in the secondary circuit of the transformer. The detailed mode analysis of HB invertor was described. The operation characteristics of Remote Plasma Source are verified by simulation and experimental results.
키워드