대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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초정밀 위치제어를 위한 새로운 디지털 아날로그 혼합형 엔코더

A novel encoder of digital and analog hybrid typo ofr servo control with high-precision resolution

  • 박종원 (부경대학교 기계과) ;
  • 홍정표 (부경대학교 기계과) ;
  • 박성준 (동명대학 전기전자자동화정보계열) ;
  • 권순재 (부경대학교 기계과) ;
  • 손무헌 (동명대학 전기전자자동화정보계열) ;
  • 김종달 (동명대학 전기전자자동화정보계열) ;
  • 김규섭 (동명대학 전기전자자동화정보계열)
  • 발행 : 2003.07.21
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초록

Position controls are very important in semiconductor manufacturing devices, machine tools precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

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