대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 하계학술대회 논문집 C
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- Pages.1732-1734
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- 2003
PDP용 MgO 박막의 스퍼터 연구
Sputtering of Magnesium Oxide this film for Plasma Display Panel Application
- Choi, Young-Wook (Korea Electrotechnology Research Institute) ;
- Kim, Jee-Hyun (Korea Electrotechnology Research Institute)
- 발행 : 2003.07.21
초록
An MgO thin film sputtering system for the PDP (Plasma Display Panel) applications has been developed. This system was manufactured with a vertical In-Line type of 42 inch, which has the length of 520 mm and the width of 900 mm. A reactive magnetron discharge for this sputtering was generated using an unipolar pulsed power supply which has functions of constant voltage (Max. 500 V) and current (Max. 15 A) control, frequency of
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