대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 하계학술대회 논문집 C
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- Pages.1719-1721
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- 2003
Langmuir Probe를 이용한 유도결합형 플라즈마의 측정
Measurement of Inductively Coupled Plasma Using Langmuir Probe
- 이영환 (원광대학교 전기 전자 및 정보 공학부) ;
- 조주웅 (원광대학교 전기 전자 및 정보 공학부) ;
- 김광수 (원광대학교 전기 전자 및 정보 공학부) ;
- 최용성 (원광대학교 전기 전자 및 정보 공학부) ;
- 박대희 (원광대학교 전기 전자 및 정보 공학부)
- Lee, Y.H. (School of Electrical Electronic and Information Engineering, Wonkwang University) ;
- Jo, J.U. (School of Electrical Electronic and Information Engineering, Wonkwang University) ;
- Kim, K.S. (School of Electrical Electronic and Information Engineering, Wonkwang University) ;
- Choi, Y.S. (School of Electrical Electronic and Information Engineering, Wonkwang University) ;
- Park, D.H. (School of Electrical Electronic and Information Engineering, Wonkwang University)
- 발행 : 2003.07.21
초록
In this paper, electrical characteristics of inductively coupled plasma in an electrodeless fluorescent lamp were investigated using a Langmuir probe with a variation of Ar gas pressure. The RF output was applied in the range of 5-50W at 13.56MHz. The internal plasma voltage of the chamber and the probe current were measured while varying the supply voltage to the Langmuir probe in the range of -100V
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