대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 하계학술대회 논문집 C
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- Pages.1647-1649
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- 2003
아르곤 직류방전의 충돌쉬스 구조해석
Analysis of Collisional Sheath in an Argon dc Discharge
초록
The electric fields of the sheath region in an argon do discharge were measured using a laser optogalvanic spectroscopy in a pressure range from 0.88 to 10 Torr, where collisions are significant in the sheath region. The sheath width is estimated as the position where the electric field becomes zero, and the pressure dependence of the measured sheath width was obtained to be
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