대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 하계학술대회 논문집 C
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- Pages.1430-1432
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- 2003
PDP 투명전극의 응용을 위한 ZnO:Al 박막의 제작 및 평가
Properties of ZnO:Al Transparent Conducting Films for PDP
- Park, Kang-Il (Kyungsung Univ) ;
- Kim, Byung-Sub (Kyungsung Univ) ;
- Kim, Hyun-Soo (Kyungsung Univ) ;
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Lim, Dong-Gun
(Kyungsung Univ) ;
- Park, Gi-Yub (Busan Info-Tech College) ;
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Lee, Se-Jong
(Kyungsung Univ) ;
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Kwak, Dong-Joo
(Kyungsung Univ)
- 발행 : 2003.07.21
초록
Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure and deposition time on the electrical, optical and morphological properties were investigated experimentally. ZnO:Al films with the optimum growth conditions of working gas pressure and
substrate temperature showed resistivity of
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