Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2002.10a
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- Pages.87.1-87
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- 2002
Study on the Electrostriction of PZT Thin Film Bimorph Actuator for Mass Sensor with Self-Sensing
자가검출용 질량센서를 위한 PZT 박막형 Bimorph 액츄에이터의 전왜특성 연구
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