Tribological properties of DLC films on polymers

  • Hashizume, T. (Oiles corporation) ;
  • Miyake, S. (Nippon Institute of Technology) ;
  • Watanabe, S. (Nippon Institute of Technology) ;
  • Sato, M. (Oiles corporation)
  • 발행 : 2002.10.21

초록

Our study is to search for tribological properties of diamond-like carbon (DLC) films as known as anti- wear hard thin film on various polymers. This report deals with the deposition of DLC films on various polymer substrates in vacuum by magnetron radio frequency (RF) sputtering method with using argon plasma and graphite, titanium target. The properties of friction and wear are measured using a ball-on-disk wear -testing machine. The properties of friction and wear have been remarkably improved by DLC coating. Moreover the composition of DLC films has been analyzed by using auger electron spectroscopy(AES). The wear rate of titanium-containing DLC film is lower than that of no-metal-containing DLC film.

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