한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2002년도 제22회 학술발표회 초록집
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- Pages.208-208
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- 2002
Nanometer-Size Writing using 200 keV Electron Beam Lithography
- Choi, Seong-S. (Department of Physics, Sun Moon University) ;
- Carcenac, F. (LAAS/CNRS) ;
- Viue, C. (LAAS/CNRS)
- 발행 : 2002.02.19