Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.208-208
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- 2002
Nanometer-Size Writing using 200 keV Electron Beam Lithography
- Choi, Seong-S. (Department of Physics, Sun Moon University) ;
- Carcenac, F. (LAAS/CNRS) ;
- Viue, C. (LAAS/CNRS)
- Published : 2002.02.19
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