Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.173-173
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- 2002
Two-dimensional simulation of inductively coupled large-area plasma source
- Park, S.E. (Dept. of Electrical Engineering, POSTECH) ;
- Lee, J.K. (Dept. of Electrical Engineering, POSTECH) ;
- Lee, Y.J. (Dept. of Materials Engineering, SKKU) ;
- Yeom, G.Y. (Dept. of Materials Engineering, SKKU)
- Published : 2002.02.19
Abstract
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