한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2002년도 제22회 학술발표회 초록집
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- Pages.172-172
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- 2002
The electron cyclotron resonance (ECR) at various conditions in the inductively coupled Plasma(ICP)
- Jeong, Jin-Uk (PLASMART R&D Center) ;
- Kim, Seong-Sik ;
- Lee, Sang-Won ;
- Jang, Hong-Yeong
- 발행 : 2002.02.19