Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.117-117
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- 2002
Deposition of $ZrO_2$ Thin Films Using RF Magnetron Sputtering and Characterization of Their Properties on Different $O_2$ Concentrations
- Jeong, S.H. (Department of Chemistry, Sungkyunkwan University) ;
- Shin, Y.S. (Department of Chemistry, Sungkyunkwan University) ;
- Bae, I.S. (Department of Chemistry, Kookmin University) ;
- Kwak, H.T. (Department of Chemistry, Kookmin University) ;
- Lee, J.W. (Department of Chemistry, Sungkyunkwan University) ;
- Lee, S.B. (Department of Chemistry, Sungkyunkwan University) ;
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Boo, J.H.
(Department of Chemistry, Sungkyunkwan University)
- Published : 2002.02.19
Abstract
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