한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2002년도 제23회 학술발표회 초록집
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- Pages.198-198
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- 2002
Heating Mode Transition in the Capacitive Mode of Inductively Coupled Plasma and the Electron Temperature Change During the E-H transition
- 발행 : 2002.06.27