High rate deposition of MgO films by reactive magnetron sputtering with additional electron emission

  • Nam, Kyung-H. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
  • Chung, Yun-M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
  • Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
  • Published : 2002.06.27