한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2002년도 제23회 학술발표회 초록집
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- Pages.191-193
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- 2002
Applications of Plasma Modeling for Semiconductor Industry
- Efremov, Alexandre (Department of Microelectronic Devices & Materials Technology, State University of Chemistry & Technology)
- 발행 : 2002.06.27