Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.191-193
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- 2002
Applications of Plasma Modeling for Semiconductor Industry
- Efremov, Alexandre (Department of Microelectronic Devices & Materials Technology, State University of Chemistry & Technology)
- Published : 2002.06.27
Abstract
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