Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.162-162
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- 2002
Direct Measurements of Strain Depth Profile Changes in Ge Nano-structures on Si (001) with Pyramid to Dome Shape Transition
- Lee, Hyung-Ik (Nano Surface Group, Korea Research Institute of Standards and Science (KRISS)) ;
- Moon, Dae-Won (Nano Surface Group, Korea Research Institute of Standards and Science (KRISS)) ;
- Cho, B. (Department of Materials Science, University of Illino) ;
- Liu, C.P. (Department of Materials Science, University of Illino) ;
- Wall, M.A. (Department of Materials Science, University of Illino) ;
- Green, J.E. (Department of Materials Science, University of Illino)
- Published : 2002.06.27
Abstract
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