Direct Measurements of Strain Depth Profile Changes in Ge Nano-structures on Si (001) with Pyramid to Dome Shape Transition

  • Lee, Hyung-Ik (Nano Surface Group, Korea Research Institute of Standards and Science (KRISS)) ;
  • Moon, Dae-Won (Nano Surface Group, Korea Research Institute of Standards and Science (KRISS)) ;
  • Cho, B. (Department of Materials Science, University of Illino) ;
  • Liu, C.P. (Department of Materials Science, University of Illino) ;
  • Wall, M.A. (Department of Materials Science, University of Illino) ;
  • Green, J.E. (Department of Materials Science, University of Illino)
  • Published : 2002.06.27