Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.154-154
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- 2002
Ti thin film deposited by grid-assisted magnetron sputtering
- Jung, Min-J (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Nam, Kyung-H (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Han, Jeon-G (Center for Advanced Plasma Surface Technology Sungkyunkwan University) ;
- Shaginyan, Leonid R. (Institute for Problems of Materials Science of academy of sciences of Ukraine)
- Published : 2002.06.27
Abstract
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