Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
- /
- Pages.117-117
- /
- 2002
A Simple way to fabricate nano-dot array : self-assebled block-copolymer template
-
Park, Jong-Hyeok
(ETRI) ;
-
Ha, Jeong-Suk
;
-
Park, Gyeong-Wan
(ETRI)
- Published : 2002.06.27
Abstract
Keywords