Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.105-105
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- 2002
Fabrication of NSOM Cantilever using Wet isotropic Etching
- Choi, Seong-S (Department of Nanoscience, SunMoon University) ;
- Jung, M.Y. (Department of Nanoscience, SunMoon University) ;
- Park, S.M. (Department of Nanoscience, SunMoon University) ;
- Kim, Jong-Woo (Department of Vacuum Science, Sungkyunkwan University) ;
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Boo, J.H.
(Department of Vacuum Science, Sungkyunkwan University)
- Published : 2002.06.27
Abstract
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