Nanofabrication Techniques of Subwavelengthsize Aperture for NSOM Application

  • Choi, Seong-S (Dept. of Nanoscience, Sun Moon University) ;
  • Jung, M.Y. (Dept. of Nanoscience, Sun Moon University) ;
  • Kim, J.W. (Dept. of Vacuum Science, Sungkyunkwan University) ;
  • Boo, J.H. (Dept. of Vacuum Science, Sungkyunkwan University)
  • 발행 : 2002.06.27