Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.104-104
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- 2002
Nanofabrication Techniques of Subwavelengthsize Aperture for NSOM Application
- Choi, Seong-S (Dept. of Nanoscience, Sun Moon University) ;
- Jung, M.Y. (Dept. of Nanoscience, Sun Moon University) ;
- Kim, J.W. (Dept. of Vacuum Science, Sungkyunkwan University) ;
- Boo, J.H. (Dept. of Vacuum Science, Sungkyunkwan University)
- Published : 2002.06.27
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