Arsenic의 첨가량에 따른 방사선 검출센서 (a-Se)의 전기적 특성 비교

The Comparison of Electric Characteristics of Radiation Detective Sensor(a-Se) with changing composition ratio of Arsenic

  • 석대우 (인제대학교 의생명공학대학 의용공학과) ;
  • 강상식 (인제대학교 의생명공학대학 의용공학과) ;
  • 이동길 (인제대학교 의생명공학대학 의용공학과) ;
  • 김재형 (인제대학교 의료 영상 연구소) ;
  • 남상희 (인제대학교 의료 영상 연구소)
  • Seok, Dae-Woo (Department of Biomedical Engineering, College of Biomedical Science and Engineering, Inje University) ;
  • Kang, Sang-Sik (Department of Biomedical Engineering, College of Biomedical Science and Engineering, Inje University) ;
  • Lee, Dong-Gil (Department of Biomedical Engineering, College of Biomedical Science and Engineering, Inje University) ;
  • Kim, Jae-Hyung (Medical Imaging Research center of Inje University) ;
  • Nam, Sang-Hee (Medical Imaging Research center of Inje University)
  • 발행 : 2002.11.07

초록

There has recently been much interest and research in developing digital x-ray systems based on using amorphous selenium(a-Se) photoconductors as the image receptor. The amorphous selenium layer that is currently being studied for use as an x-ray photoconductor is not pure a-Se but rather amorphous selenium alloyed with arsenic. We fabricated samples using the selenium and arsenic alloy with various concentrations of the arsenic. In this work, x-ray photoconductor using amorphous selenium alloyed with arsenic were fabricated with different concentrations of the arsenic (0.1 wt.%, 0.3wt.%, 0.5wt.%, 1wt.%, 1.5wt.%, 3wt.%, 5wt.%). The seven kind of samples was fabricated with a-Se alloyed with arsenic through vacuum thermal evaporation. We also investigate the arsenic concentration dependence on the device performance in radiation detector. The electric characteristics of radiation detector devices with changing additive ratio of the arsenic is performed by measuring the x-ray induced photocurrent and integrating it over time to find the total charge. The thickness of a-Se is $100{\mu}m$. Bias voltages $3V/{\mu}m$, $6V/{\mu}m$$9V/{\mu}m$ are applied at the samples. As results, the net charge of a-Se 0.3% As sample is $526.0pC/mR/cm^2$ at $9V/{\mu}m$ bias. The net charge is decreased as with the increasing additive ratio of arsenic.

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